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µ-FLOW series L01
Mass Flow Meters / Controllers for liquids


µ-FLOW are Liquid Flow Meters/Controllers for ultra low flow ranges. The instruments operate on a thermal, thru-flow measuring principle. The flow meter can be connected to a control valve to form a closed control loop.

Lowest range 5 ... 100 mg/h
Highest range 0,1 ... 2 g/h (fluids with thermal properties similar to H2O)

For higher flow ranges, Bronkhorst offers the LIQUI-FLOW series.
Ranges: 0,1 ... 5 g/h up to 0,4 ... 20 kg/h H2O-equivalent.

Liquid flow controllers

Flow control is achieved by integrating a control valve onto the body of the Liquid Flow Meter. This control valve has a purge connection to eliminate air or gas during start-up. The electronic control function forms part of the normal circuitry in the meter.

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  • Features
  • Applications
  • Flow capacities
  • Documentation


  • No moving parts
  • Thru-Flow measurement
  • Attitude insensitive
  • Fast and accurate measurement
  • Negligible dead-volume (sensor: 1,5...33 µl)
  • In combination with a control valve: continuous and stable control
  • Analog or digital: RS232, Profibus-DP®, DeviceNet™, Modbus, EtherCAT or FLOW-BUS 
  • Stainless Steel sensor
  • NEW: 1000 bar (15000 psi) LFM for 100 up to 450 mg/h FS (based on H2O)


  • Pharmaceutical industry
  • Food industry (flavors, additives)
  • Biotechnical industry
  • Analytical laboratories
  • Evaporation processes (see CEM/VDM-system)
  • HPLC/UPLC applications

Flow capacities (based on H2O equivalent)

Liquid Flow Meter   Ranges
 Series L01(PN400)
min. 5 ... 100 mg/h
max. 0,1 ... 2 g/h
Series L02-20D (PN1000) min. 7,5 ... 150 mg/h
max. 22,5 ... 450 mg/h
Liquid Flow Controller  Ranges 
Series L01V12 (PN100) min. 5 ... 100 mg/h
max. 0,1 ... 2 g/h


For more information see leaflet "µ-FLOW series L01"

L01 Mass Flow Meter µ-FLOW Mass Flow Controller
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