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Micro Fluidic Manifold Solutions for Mass Flow and Pressure Measurement / Control


Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional Mass Flow and Pressure Meters and Controllers have needed a footprint of 1.5", as for instance specified in the NeSSITM system. Now, and in close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst developed the IQ+FLOW® Mass Flow sensor. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realizing the ultra compact flow and pressure controllers.

Customer specific design

The IQ+FLOW® concept offers the following functional modules:

  • Flow meter; typical flow ranges from 10 mln/min up to 5 ln/min (Full Scale values)
  • Pressure meter; typical pressure ranges of the order of 100 psi
  • Control valve
  • Three-way valve
  • Shut-off valve
  • Filter
  • Mixing chamber

A combination of these modules can be mounted on a compact manifold, in line with a customers requirement, and following open design discussions. Further possibilities might include either an aluminium or a stainless steel manifold with perhaps female inlet/outlet ports that could be suitable for either gas or liquid. As there are truly an infinite number of possible solutions we highly recommend you to contact Bronkhorst to discuss your application.

  • Features
  • Analytical applications
  • Documentation

High intrinsic quality, featuring...

  • Very stable Zero, due to the thermally balanced chip-sensor
  • Compact assembly ensures space efficiency
  • Economical solution, low cost of ownership
  • Tubeless construction reduces potential leak points
  • Top-mount modules; easily accessible
  • Pre-tested "Plug and Play" units, reducing custom testing requirements
  • Digital digital communication (RS232 or RS485)

Analytical applications

Examples of analytical applications based on the ultra compact modules with a footprint of 0.75" are:

  • Flow - Pressure control at the injector side of a GC
  • Flow control at the detector side of a GC or HPLC
  • Flow control in an FID detector


For more information see leaflet "IQ+FLOW Micro Solid State Controllers"

Example of micro-fluidic manifold solution 3-Channel MFC
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