Mixing chambers for creating homogeneous gas mixtures
There is an increasing need for special gas mixtures. Moreover, very often varying concentrations are required. Bronkhorst have gained much experience in supplying Mass Flow Controllers for such applications. Creating homogeneous gas mixtures is not just a matter of putting the controlled flows of two or more gas streams together; for instance, if you need to dilute 1 mln/min of dopant with 10 ln/min of dilution gas you cannot expect to obtain a homogeneous mixture unless an appropriate mixing chamber is used. Bronkhorst developed a series of special mixing chambers for such purposes. Please contact your local distributor to discuss the options for your application.
Please find here our leaflet "Gas Mixing Chambers"